In this study. we investigate the deposition of high-k dielectric materials. namely Al2O3 and HfO2. using atomic layer deposition for 4H-SiC metal-oxide-semiconductor applications. https://www.cosmeticssquadets.shop/product-category/notebooks/
Leakage Current Behavior in HfO2/SiO2/Al2O3 Stacked Dielectric on 4H-SiC Substrate
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